SemiFA: An Agentic Multi-Modal Framework for Autonomous Semiconductor Failure Analysis Report Generation

Abstract

Semiconductor failure analysis (FA) requires engineers to examine inspection images, correlate equipment telemetry, consult historical defect records, and write structured reports, a process that can consume several hours of expert time per case. We present SemiFA, an agentic multi-modal framework that autonomously generates structured FA reports from semiconductor inspection images in under one minute. SemiFA decomposes FA into a four-agent LangGraph pipeline: a DefectDescriber that classifies and narrates defect morphology using DINOv2 and LLaVA-1.6, a RootCauseAnalyzer that fuses SECS/GEM equipment telemetry with historically similar defects retrieved from a Qdrant vector database, a SeverityClassifier that assigns severity and estimates yield impact, and a RecipeAdvisor that proposes corrective process adjustments. A fifth node assembles a PDF report. We introduce SemiFA-930, a dataset of 930 annotated semiconductor defect images paired with structured FA narratives across nine defect classes, drawn from procedural synthesis, WM-811K, and MixedWM38. Our DINOv2-based classifier achieves 92.1% accuracy on 140 validation images (macro F1 = 0.917), and the full pipeline produces complete FA reports in 48 seconds on an NVIDIA A100-SXM4-40 GB GPU. A GPT-4o judge ablation across four modality conditions demonstrates that multi-modal fusion improves root cause reasoning by +0.86 composite points (1-5 scale) over an image-only baseline, with equipment telemetry as the more load-bearing modality. To our knowledge, SemiFA is the first system to integrate SECS/GEM equipment telemetry into a vision-language model pipeline for autonomous FA report generation.